Silicon Carbide Microelectromechanical Systems For Harsh Environments
af Rebecca (Univ Of Edinburgh Cheung
Bog, Hardback, Engelsk, 2006
Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.
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Bogdetaljer
- SprogEngelsk
- IndbindingHardback
- ISBN9781860946240
- Udgivet30/06/2006
- Udgivet afImperial College Press
- Længde192 sider
- ForfatterRebecca (Univ Of Edinburgh Cheung
- GenreBusiness og læring